DSP-21 Manual Stainless Steel Valve |
We recommned and provide Top-of the-line performance with Superb quality Cylinder Valve from NERIKI.
Manufacturer information, visit: www.neriki.com
This series of our Stainless Valves are the most popular and are widely used in Japan, Taiwan, Korea and other Asian countries.
With this series, we are renowned as the symbol of the valve manufacturer for the Semiconductor industry.
Since the introduction of this valve on the market, Neriki have supplied more than 200,000 valves and enjoy reputation.
- 2x10^-10 sealing integrity
- Grand section with double-seal structure
- DISS outlet is available
- Assembled in our high tech clean room (Class 10)
- Precision-machined finish for internal surface is less than R-max 4um, and up to R-max 0.4um is also available upon specific request.
- Packaged individually in Nitrogen-sealed Polyethylene bags to eliminate contamination.
- Our well designed construction has taken into account minimum particle generation
Valve for the manufacturing of Semiconductors/LCD/Solar panel
Contaminant-free gas for manufacturing
In the field of semiconductors, various high purity gases are used at each manufacturing stage, e.g. in the formation of oxide film and dry etching, and as the ambient gas for single crystal culture. For the manufacturing of super-LSI through hyperfine processing with submicron accuracy, clean stainless-steel valves are used which produce no micro-dust, moisture content or oil. These stainless-steel valve greatly enhance product yield.
Grade | Surface roughness at gas wetted surface | Cleansing method | Assembly | Seal test | Pressure test | Packing |
---|---|---|---|---|---|---|
Grade 20 | Rmax below 0.8micrometer | DI water | Clean room(Class10) | High purity Nitrogen, Snoop testing or by Helium leak detector | High purity Nitrogen, pressured snoop testing | Clean packed with high purity Nitrogen filled |
Grade 25 | Rmax below 1.0micrometer | DI water | ||||
Grade 30 | Rmax below 4.0micrometer | Organic Solvent |
CV Value
・For Use: 0.6
・For Filling: 0.6
・Maximum service pressure: 20.00Mpa (200Bar)